Microcogs (image 2 of 3). Coloured scanning electron micrograph (SEM) of microcogs forming a microgear mechanism. This could be used in a micromachine, or MicroElectroMechanical System (MEMS). MEMS include microscopic sensors and robots (nanorobots). Microsensors are used to detect acceleration, pressure, flow rates and the presence of certain chemicals. The high-precision cogs are made of nickel to 150 microns in thick- ness. They were created by Professor Henry Guckel at the Wisconsin Center for Applied Microelectron- ics at the University of Wisconsin, USA. Magnific- ation: x130 at 6x7cm size. See images T395/079-081 for the microcogs at increasing magnification.