Microcogs (image 1 of 3). Hand holding microcogs forming a microgear mechanism. This could be used in a micromachine, or MicroElectroMechanical System (MEMS). MEMS include microscopic sensors and robots (nanorobots). Microsensors are used to detect acceleration, pressure, flow rates and the presence of certain chemicals. The high-precision cogs are made of nickel to 150 microns in thickness. They were created by Professor Henry Guckel at the Wisconsin Center for Applied Microelectronics at the University of Wisconsin, USA. Magnification: x0.3 at 6x7cm size. See images T395/076-078 for the microcogs at increasing magnification.